Ptychographic imaging with a tin plasma based EUV light source

Jülich / Forschungszentrum (2016) [Buchbeitrag]

JARA FIT Annual Report 2015

Authors

Selected Authors

Bußmann, J.
Odstrčil, M.
Bresenitz, R.
Teramoto, Y.
Juschkin, L.

Identifier

  • REPORT NUMBER: RWTH-2017-00520