Table-top EUV scatterometer MARYS with high-brightness discharge plasma source

Jülich / Forschungszentrum (2016) [Contribution to a book]

JARA-FIT annual report. - 2015

Authors

Selected Authors

Maryasov, O.
Juschkin, Larissa

Identifier

  • REPORT NUMBER: RWTH-2017-00523